Understanding how the liquid-metal ion source works

被引:69
作者
Forbes, RG
机构
关键词
D O I
10.1016/S0042-207X(96)00227-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
There is some interesting physics in how the liquid-metal ion source (LMIS) works. This short review describes our current understanding, covering the following topics. Distinction between the real Taylor-Gilbert cone and Taylor's mathematical cone. Thermodynamic origin of the pressure-difference formula. Shape of an operating LMIS:the cusp-on-a-cone as expected shape and as an electrically driven vena contracta. Onset behaviour and Taylor's slender-body formula. Ion energy distributions, and interpretation in terms of surface processes and space-charge. Swanson's proof that the emission mechanism is field evaporation. Predicting the low-current Ga LMIS apex radius as 1.5 nm. The low-current Ga LMIS as a device driven by a negative pressure of order 40 atm. Re-examination of Mair's formula for LMIS current/voltage characteristics, and the role of space-charge. Cusp length as a function of emission current:theory and modelling. Emitter stability and control mechanisms:space-charge stabilisation, inertial/geometrical stabilisation, pressure-change destabilisation. Secondary emission phenomena:electrons, neutrals and photons. The high-temperature anomaly in the ion energy distribution, and a possible explanation. Instability and the formation of microdroplets and nanodroplets. Numerical modelling of basic LMIS behaviour: current/voltage characteristics for sources with and without viscous drag; modelling of cusp length and limiting half-angle; modelling of time-dependent effects. Current research tasks. Copyright (C) 1996 Elsevier Science Ltd.
引用
收藏
页码:85 / 97
页数:13
相关论文
共 64 条
[11]  
DRIESEL W, COMMUNICATION
[12]   APPEARANCE ENERGY SPECTROSCOPY OF FIELD IONS [J].
ERNST, N .
APPLIED SURFACE SCIENCE, 1993, 67 (1-4) :82-96
[13]  
FABER TE, 1995, FLUID DYNAMICS PHYSI
[14]   FIELD EVAPORATION THEORY - A REVIEW OF BASIC IDEAS [J].
FORBES, RG .
APPLIED SURFACE SCIENCE, 1995, 87-8 (1-4) :1-11
[15]   NEW UNDERSTANDINGS IN THE THEORY OF LIQUID-METAL ION SOURCES [J].
FORBES, RG ;
MAIR, GLR ;
LJEPOJEVIC, NN ;
LIU, WB .
APPLIED SURFACE SCIENCE, 1995, 87-8 (1-4) :99-105
[16]   CALCULATION OF THE SHAPE OF THE LIQUID CONE IN A LIQUID-METAL ION-SOURCE [J].
FORBES, RG ;
LJEPOJEVIC, NN .
SURFACE SCIENCE, 1991, 246 (1-3) :113-117
[17]   GENERALIZED THEORY OF STANDARD FIELD-ION APPEARANCE ENERGIES [J].
FORBES, RG .
SURFACE SCIENCE, 1976, 61 (01) :221-240
[18]  
Gabovich M. D., 1983, S SOVIET PHYSICS USP, V26, P447
[19]  
GAUBI H, 1982, P 29 INT FIELD EM S, P357
[20]   ANALYSIS OF ENERGY BROADENING IN CHARGED-PARTICLE BEAMS [J].
GESLEY, MA ;
SWANSON, LW .
JOURNAL DE PHYSIQUE, 1984, 45 (NC9) :167-172