Structure and magnetic properties of co-sputtered Co-C thin films

被引:44
作者
Konno, TJ [1 ]
Shoji, K [1 ]
Sumiyama, K [1 ]
Suzuki, K [1 ]
机构
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
cobalt-carbon system; nano-granular morphology; magnetic granular films; sputter-deposition; transmission electron microscopy;
D O I
10.1016/S0304-8853(98)01160-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We studied the structure and magnetic properties of co-sputtered Co1-xCx thin films using a transmission electron microscope (TEM) and a SQUID magnetometer. These properties were found to depend critically on deposition temperature, T-s, and composition, x. Generally, phase separation into metallic Co and graphite-like carbon phases proceeds with increasing T-s and decreasing x. Plan view and cross-sectional TEM images of the films prepared showed that Co grains about 10-20 nm in diameter and 30-50 nm in height are three-dimensionally separated by graphite-like carbon layers 1-2 nm thick. Optimum magnetic properties with saturation magnetization of 380 emu/cc and coercivity of 400 Oe were obtained for a film with x = 0.5 and T-s = 350 degrees C. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:9 / 18
页数:10
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