Structure and magnetic properties of co-sputtered Co-C thin films

被引:44
作者
Konno, TJ [1 ]
Shoji, K [1 ]
Sumiyama, K [1 ]
Suzuki, K [1 ]
机构
[1] Tohoku Univ, Inst Mat Res, Aoba Ku, Sendai, Miyagi 9808577, Japan
关键词
cobalt-carbon system; nano-granular morphology; magnetic granular films; sputter-deposition; transmission electron microscopy;
D O I
10.1016/S0304-8853(98)01160-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We studied the structure and magnetic properties of co-sputtered Co1-xCx thin films using a transmission electron microscope (TEM) and a SQUID magnetometer. These properties were found to depend critically on deposition temperature, T-s, and composition, x. Generally, phase separation into metallic Co and graphite-like carbon phases proceeds with increasing T-s and decreasing x. Plan view and cross-sectional TEM images of the films prepared showed that Co grains about 10-20 nm in diameter and 30-50 nm in height are three-dimensionally separated by graphite-like carbon layers 1-2 nm thick. Optimum magnetic properties with saturation magnetization of 380 emu/cc and coercivity of 400 Oe were obtained for a film with x = 0.5 and T-s = 350 degrees C. (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:9 / 18
页数:10
相关论文
共 31 条
[11]   GRAIN-SIZE DEPENDENCE OF COERCIVITY AND PERMEABILITY IN NANOCRYSTALLINE FERROMAGNETS [J].
HERZER, G .
IEEE TRANSACTIONS ON MAGNETICS, 1990, 26 (05) :1397-1402
[12]   IMPERFECTIONS IN HEXAGONAL COBALT [J].
HOUSKA, CR ;
AVERBACH, BL .
ACTA CRYSTALLOGRAPHICA, 1958, 11 (03) :139-144
[13]  
KERSTEN M, 1943, Z PHYS, V44, P63
[14]   GROWTH OF DIAMOND AT ROOM-TEMPERATURE BY AN ION-BEAM SPUTTER DEPOSITION UNDER HYDROGEN-ION BOMBARDMENT [J].
KITABATAKE, M ;
WASA, K .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) :1693-1695
[15]   Size effect on the crystal phase of cobalt fine particles [J].
Kitakami, O ;
Sato, H ;
Shimada, Y ;
Sato, F ;
Tanaka, M .
PHYSICAL REVIEW B, 1997, 56 (21) :13849-13854
[16]   Fine metallic particles for magnetic domain observations [J].
Kitakami, O ;
Sakurai, T ;
Miyashita, Y ;
Takeno, Y ;
Shimada, Y ;
Takano, H ;
Awano, H ;
Ando, K ;
Sugita, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (03) :1724-1728
[17]   CRYSTALLIZATION OF CO-SPUTTERED AMORPHOUS COBALT CARBON ALLOYS [J].
KONNO, TJ ;
SINCLAIR, R .
ACTA METALLURGICA ET MATERIALIA, 1994, 42 (04) :1231-1247
[18]   CRYSTALLIZATION OF AMORPHOUS-CARBON IN CARBON-COBALT LAYERED THIN-FILMS [J].
KONNO, TJ ;
SINCLAIR, R .
ACTA METALLURGICA ET MATERIALIA, 1995, 43 (02) :471-484
[19]  
MORRISH AH, 1965, PHYSICAL PRINCIPLES, P344
[20]  
MURDOCK ES, 1992, IEEE T MAGN, V28, P3075