Reliability of measuring the roughness exponent in a small-length-scale regime

被引:4
作者
Deng, J [1 ]
Ye, F [1 ]
Long, QY [1 ]
Lung, CW [1 ]
机构
[1] Chinese Acad Sci, Int Ctr Mat Phys, Inst Met Res, Shenyang 110015, Peoples R China
来源
PHYSICAL REVIEW B | 1999年 / 59卷 / 01期
关键词
D O I
10.1103/PhysRevB.59.8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this paper, the reliability of measuring the roughness exponent in a small-length-scale regime is discussed. When the length scale is very small, the measured size of one sampling is much smaller than that of the whole region to be characterized, hence the reliability of the measured result should be seriously considered. In a region with a given scaling property we simulate the actual experiment, in which the roughness exponent in a small-length-scale regime is measured by using scanning electron microscopy under high resolution. We use the concept of the confidence coefficient to analyze the reliability of the measured result. It is shown that the reliability of the measured result can be influenced by two factors: one is the number of the samplings, the other is the size of the maximum band in the ''variable bandwidth method.'' [S0163-1829(99)13601-4].
引用
收藏
页码:8 / 11
页数:4
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