Emission properties of an amorphous AlN:Cr3+ thin-film phosphor

被引:41
作者
Caldwell, ML [1 ]
Martin, AL
Dimitrova, VI
Van Patten, PG
Kordesch, ME
Richardson, HH
机构
[1] Ohio Univ, Condensed Matter & Surface Sci Program, Athens, OH 45701 USA
[2] Ohio Univ, Dept Chem & Biochem, Clippinger Labs, Athens, OH 45701 USA
[3] Univ Rousse, Dept Phys, Rousse 7017, Bulgaria
[4] Ohio Univ, Dept Phys, Clippinger Labs, Athens, OH 45701 USA
关键词
D O I
10.1063/1.1351531
中图分类号
O59 [应用物理学];
学科分类号
摘要
Chromium-doped aluminum nitride (AlN:Cr) films were grown on p-doped silicon (111) by rf magnetron sputtering in a nitrogen atmosphere at a pressure of 10(-4) Torr. Film thickness was typically 200 nm. After growth, the films were "activated" at similar to 1300 K for 30 min in a nitrogen atmosphere. Films activated in this manner exhibit intense cathodoluminescence and photoluminescence emission. Spectral evidence demonstrates conclusively that the luminescent centers are Cr3+ ions. (C) 2001 American Institute of Physics.
引用
收藏
页码:1246 / 1248
页数:3
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