Micromachined acoustic-wave liquid ejector

被引：58

作者：

Huang, D ^{[1
]}

Kim, ES

机构：

[1] Univ Hawaii Manoa, Dept Elect Engn, Honolulu, HI 96822 USA

[2] Univ So Calif, Dept EE Electrophys, Los Angeles, CA 90089 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2001年 / 10卷 / 03期

基金：

美国国家科学基金会;

关键词：

acoustic waves; ejector; Fresnel half-wave band (FHWB) sources; ink jet printing; piezoelectric; self-focusing;

D O I：

10.1109/84.946804

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes the design and performance of micromachined, self-focusing acoustic-wave liquid ejector (AWLE) that requires no heat, nozzle, nor acoustic lens. The AWLE has a very simple device structure and is easy to fabricate. Three versions of AWLE have been designed, fabricated, and tested for an ink-jet printing application. Also developed are computer simulation and design aids that take into account the acoustic loss in water and the two-time wave reflections at the water-air and water-transducer interfaces. The AWLE has been observed to eject water droplets of about 5 mum in diameter with radio frequency (RF) pulses of 5 mus pulsewidth. Overall, the AWLE has been shown to be capable of improving the printing resolution and speed of an ink-jet printing significantly.

引用

页码：442 / 449

页数：8

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