Effects of substrate temperature on the physical properties of strained BaTiO3/LaNiO3 artificial superlattices

被引:20
作者
Liang, YC [1 ]
Liang, YC [1 ]
机构
[1] Chien Kuo Technol Univ, Dept Mech Engn, Changhua 500, Taiwan
[2] Natl Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan
关键词
surface structure; superlattices; perovskites; dielectric materials;
D O I
10.1016/j.jcrysgro.2005.08.034
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
An artificially layered perovskite composed of dielectric BaTiO3 (BTO) and conductive LaNiO3 (LNO) was grown on a LaNiO3-coated SrTiO3 (0 0 1) single crystal substrate by a radio-frequency magnetron sputtering system. The cross-sectional image of transmission electron microscopy confirmed the formation of BTO/LNO superlattice structure. Moreover, the clearly main feature and satellite features from the (0 0 L) Bragg reflection of X-ray indicate the high quality of the BTO/LNO superlattice structure was formed on a LaNiO3-coated SrTiO3 substrate. All the superlatttice films deposited at 300-550 degrees C show a significant enhancement of dielectric constant relative to the BTO single epilayer of the same effective thickness; the higher is the deposition temperature, the larger is the dielectric constant of the films present. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:345 / 351
页数:7
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