Analysis of floating body induced transient behaviors in partially depleted thin film SOI devices

被引:48
作者
Shin, HC
Lim, IS
Racanelli, M
Huang, WLM
Foerstner, J
Hwang, BY
机构
[1] Motorola Inc, Advanced Custom Technologies, Mesa
关键词
D O I
10.1109/16.481734
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Emphasis toward manufacturability of thin film SOI devices has prompted more attention on partially depleted devices [1], [2], In this paper, drain current transients in partially depleted SOI devices due to floating-body effect are investigated quantitatively, An one-dimensional analytical model is developed to predict the transient effect and MEDICI simulation is performed to confirm the model. With the model, the amount of the turn-on current enhancement and the turn-off current suppression are calculated, The transient characteristics can be used in investigating the quality of the SOI materials by determining the carrier lifetime. The impact of the transient effect on the device parameter extraction is described.
引用
收藏
页码:318 / 325
页数:8
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