Large air-gap magnetic levitation of electrodeposited Co-Ni-Mn-P films

被引:2
作者
Elbuken, Caglar [1 ]
Khamesee, Mir Behrad [1 ]
Yavuz, Mustafa [1 ]
机构
[1] Univ Waterloo, Dept Mech & Mechatron Engn, Waterloo, ON N2L 3G1, Canada
来源
2007 IEEE INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION, VOLS I-V, CONFERENCE PROCEEDINGS | 2007年
关键词
magnetic levitation; MEMS; micromanipulation; robotics; electrodeposition;
D O I
10.1109/ICMA.2007.4304086
中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
In this paper, a magnetic levitation system for large air-gap microlevitation is presented. The levitation of silicon samples coated with Co-Ni-Mn-P magnetic film is demonstrated. The magnetic layer was electrodeposited at room temperature with a MEMS compatible process. The magnetic properties of the Co-based films are determined and the required magnetic field is calculated. The levitation setup is designed to generate the required field in an air-gap of 200 mm. The experimental results show the 1-D levitation of 19 mg electrodeposited samples in a constant and step-wise motion. It is observed that levitating objects spin around themselves due to the shape of the magnetic field generated. A modification to the levitation system is proposed to cope with the spinning problem that will further improve the levitation performance of the system.
引用
收藏
页码:3272 / 3277
页数:6
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