Ultra accurate measurements of interface parameters with free-electron laser

被引:2
作者
Coluzza, C
机构
[1] Inst. de Physique Appliquée, Ecl. Polytech. Federale
[2] Dipartimento di Fisica, Univ. di Roma La Sapienza, 00185 Roma
关键词
D O I
10.1016/0169-4332(95)00240-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We used optical pumping by the Vanderbilt free-electron laser (FEL) and the technique of internal photoemission (IPE) to measure with an accuracy of nearly 5 meV the conduction-band discontinuity of semiconductor heterojunction interfaces as GaAlAs-GaAs and Ge-GaAs. Very recently we demonstrated, using a titanium-sapphire pumped laser, that spatially resolved internal photoemission measurements could be performed on a Pt/n-GaP Schottky barrier by a scanning near-field optics microscope within a spatial resolution of 100 nm. Shear-force and photocurrent X-Y images at different photon energies enable us to map the topography and the Schottky barrier height on the same surface. The topography's images, compared with the internal photoemission images, revealed zones where the morphology of the metallic layer was homogeneous, whereas the photocurrent was varying from place to place. Both results opened the possibility of measuring, in a simple and direct way, the local interface properties of real devices. A novel technique with submicrometric spatial resolution could be implemented: the spatially analyzed FEL-IPE (SAN FEL-IPE).
引用
收藏
页码:267 / 272
页数:6
相关论文
共 21 条
  • [1] BAINIER C, 1992, NATO E
  • [2] Capasso F., 1987, Heterojunction Band Discontinuities: Physics and Device Applications
  • [3] BAND OFFSETS IN GAAS/AMORPHOUS GE AND GAP/AMORPHOUS GE HETEROJUNCTIONS MEASURED BY INTERNAL PHOTOEMISSION
    COLUZZA, C
    LAMA, F
    FROVA, A
    PERFETTI, P
    QUARESIMA, C
    CAPOZI, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1988, 64 (06) : 3304 - 3306
  • [4] INTERNALLY DETECTED ELECTRON PHOTOEXCITATION SPECTROSCOPY ON HETEROSTRUCTURES
    COLUZZA, C
    MARGARITONDO, G
    NEGLIA, A
    CARLUCCIO, R
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04): : 744 - 748
  • [5] INTERFACE MEASUREMENTS OF HETEROJUNCTION BAND LINEUPS WITH THE VANDERBILT FREE-ELECTRON LASER
    COLUZZA, C
    TUNCEL, E
    STAEHLI, JL
    BAUDAT, PA
    MARGARITONDO, G
    MCKINLEY, JT
    UEDA, A
    BARNES, AV
    ALBRIDGE, RG
    TOLK, NH
    MARTIN, D
    MORIERGENOUD, F
    DUPUY, C
    RUDRA, A
    ILEGEMS, M
    [J]. PHYSICAL REVIEW B, 1992, 46 (19): : 12834 - 12836
  • [6] COLUZZA C, 1993, P SOC PHOTO-OPT INS, V1985, P442, DOI 10.1117/12.162743
  • [7] INTERNALLY DETECTED ELECTRON PHOTOEXCITATION SPECTROSCOPY ON HETEROSTRUCTURES
    COLUZZA, C
    NEGLIA, A
    BENNOUNA, A
    CAPIZZI, M
    CARLUCCIO, R
    FROVA, A
    SRIVASTAVA, PC
    [J]. APPLIED SURFACE SCIENCE, 1992, 56-8 : 733 - 737
  • [8] INTERNALLY DETECTED ELECTRON PHOTOEXCITATION SPECTROSCOPY ON HETEROSTRUCTURES
    COLUZZA, C
    [J]. PHYSICA SCRIPTA, 1992, T45 : 192 - 195
  • [9] EXTERNAL AND INTERNAL-REFLECTION NEAR-FIELD MICROSCOPY - EXPERIMENTS AND RESULTS
    COURJON, D
    VIGOUREUX, JM
    SPAJER, M
    SARAYEDDINE, K
    LEBLANC, S
    [J]. APPLIED OPTICS, 1990, 29 (26): : 3734 - 3740
  • [10] BALLISTIC ELECTRON-EMISSION SPECTROSCOPY OF METALS ON GAP(110)
    LUDEKE, R
    PRIETSCH, M
    SAMSAVAR, A
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (04): : 2342 - 2348