Piezoelectric properties of epitaxial NaNbO3 thin films deposited on (001)SrRuO3/Pt/MgO substrates

被引:40
作者
Mino, Takuya
Kuwajima, Shuichiro
Suzuki, Takaaki
Kanno, Isaku
Kotera, Hidetoshi
Wasa, Kiyotaka
机构
[1] Kyoto Univ, Dept Micro Engn, Sakyo Ku, Kyoto 6068501, Japan
[2] Kyoto Univ, Nanomed Merger Educ Unit, Sakyo Ku, Kyoto 6068501, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 10B期
关键词
NaNbO3 thin films; sputter deposition; epitaxial; ferroelectric; transverse piezoelectric coefficient;
D O I
10.1143/JJAP.46.6960
中图分类号
O59 [应用物理学];
学科分类号
摘要
Sodium niobate (NaNbO3, NN) thin films were deposited on (001)SrRuO3/Pt/MgO substrates by rf magnetron sputter deposition. The X-ray diffraction (XRD) pattern of the sputtered NN thin films showed epitaxial growth with a (001)-oriented perovskite structure. From the reciprocal space maps, the lattice parameters of the in-plane and out-of-plane directions were a = 0.392 nm and c = 0.395 nm, respectively. The relative dielectric constant E, and the range of the dielectric loss tan 6 were about 270 and 0.05-0.13 at 1 kHz, respectively. The P-E hysteresis loop showed clear ferroelectricity with spontaneous polarization P-s of 20 mu C/cm(2) and coercive electric field E-c of 50kV`/cm. The transverse piezoelectric properties were evaluated from the tip displacement of NN/MgO unimorph cantilevers. The transverse piezoelectric coefficient e(31)(*) (= d(31)/S-11(E)) was -0.9 C/m(2). which is almost compatible with that of the bulk NN ceramics. The tip deflection showed typical butterfly curves owing to the polarization reversal, indicating that the sputtered NN thin films had a high piezoelectric performance.
引用
收藏
页码:6960 / 6963
页数:4
相关论文
共 15 条
[1]   Electrooptic ferroelectric Na0.5K0.5NbO3 films [J].
Blomqvist, M ;
Khartsev, S ;
Grishin, A .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (08) :1638-1640
[2]   Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1-x)O3 thin films [J].
Dubois, MA ;
Muralt, P .
SENSORS AND ACTUATORS A-PHYSICAL, 1999, 77 (02) :106-112
[3]   METASTABLE FERROELECTRIC SODIUM NIOBATE [J].
DUNGAN, RH ;
GOLDING, RD .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1964, 47 (02) :73-76
[4]   POLARIZATION OF NANBO3-KNBO3 CERAMIC SOLID SOLUTIONS [J].
DUNGAN, RH ;
GOLDING, RD .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1965, 48 (11) :601-&
[5]   Fabrication of pseudocubic SrRuO3 (100) epitaxial thin films on Si by pulsed laser deposition [J].
Higuchi, T ;
Chen, YX ;
Koike, J ;
Iwashita, S ;
Ishida, M ;
Shimoda, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2002, 41 (4B) :L481-L483
[6]   Measurement of transverse piezoelectric properties of PZT thin films [J].
Kanno, I ;
Kotera, H ;
Wasa, K .
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 107 (01) :68-74
[7]   Piezoelectric properties of c-axis oriented Pb(Zr,Ti)O-3 thin films [J].
Kanno, I ;
Fujii, S ;
Kamada, T ;
Takayama, R .
APPLIED PHYSICS LETTERS, 1997, 70 (11) :1378-1380
[8]   Piezoelectric Pb(Zrx,Ti1-x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors [J].
Ledermann, N ;
Muralt, P ;
Baborowski, J ;
Forster, M ;
Pellaux, JP .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (12) :1650-1658
[9]   Pulsed-laser deposition of ferroelectric NaNbO3 thin films [J].
Saito, T ;
Adachi, H ;
Wada, T ;
Adachi, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (9B) :6969-6972
[10]   Pulsed laser deposition of high-quality (K,Na)NbO3 thin films on SrTiO3 substrate using high-density ceramic targets [J].
Saito, T ;
Wada, T ;
Adachi, H ;
Kanno, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (9B) :6627-6631