Comparison of layered based SAW sensors

被引：22

作者：

Kalantar-Zadeh, K ^{[1
]}

Powell, DA ^{[1
]}

Wlodarski, W ^{[1
]}

Ippolito, S ^{[1
]}

Galatsis, K ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2003年 / 91卷 / 1-3期

关键词：

layered surface acoustic wave (SAW); wave guiding layer; mass sensitivity; electromechanical coupling coefficient;

D O I：

10.1016/S0925-4005(03)00091-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A comprehensive investigation of layered surface acoustic wave (SAW) devices is presented. These types of SAW devices have a remarkable performance for gas and liquid sensing applications as confinement of energy in the layers generally increases their sensitivity. Different modes of wave propagations and the effect of the guiding layer thickness and material on the layered devices are discussed in this paper. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：303 / 308

页数：6

共 21 条

[1]

ASH EA, 1970, P IEEE G MTT INT MIC, P385

[2]

Campbell C., 1998, SURFACE ACOUSTIC WAV, V1

[3]

CROSS PS, 1981, HEWLETT-PACKARD J, P9

[4] A study of love-wave acoustic sensors [J].

Du, J ;

Harding, GL ;

Ogilvy, JA ;

Dencher, PR ;

Lake, M .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 56 (03) :211-219

[5] An experimental study of Love-wave acoustic sensors operating in liquids [J].

Du, J ;

Harding, GL ;

Collings, AF ;

Dencher, PR .

SENSORS AND ACTUATORS A-PHYSICAL, 1997, 60 (1-3) :54-61

[6] A LOVE PLATE BIOSENSOR UTILIZING A POLYMER LAYER [J].

GIZELI, E ;

GODDARD, NJ ;

LOWE, CR ;

STEVENSON, AC .

SENSORS AND ACTUATORS B-CHEMICAL, 1992, 6 (1-3) :131-137

[7] A NOVEL LOVE-PLATE ACOUSTIC SENSOR UTILIZING POLYMER OVERLAYERS [J].

GIZELI, E ;

STEVENSON, AC ;

GODDARD, NJ ;

LOWE, CR .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1992, 39 (05) :657-659

[8] Review of shear surface acoustic waves in solids [J].

Gulyaev, YV .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1998, 45 (04) :935-938

[9]

HARTMANN CS, RAYLEIGH WAVE THEORY, P238

[10] Properties of sensors based on shear-horizontal surface acoustic waves in LiTaO3/SiO2 and quartz/SiO2 structures [J].

Herrmann, F ;

Weihnacht, M ;

Büttgenbach, S .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2001, 48 (01) :268-273

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