Scanning probe lithography using self-assembled monolayers

Today, there is a diverse array of approaches to scanning probe lithography on SAMs. Each technique has been found to have some advantages and limitations over the others. Scanning probe lithography emerges as one of the most expedient methods for making nanometer-scale patterns, at least in a laboratory setting. Other techniques do exist, for example, microcontact printing of SAMs has been extended to the ca. 50 nm scale. SAMs are perhaps the ideal patterning elements as they offer the most convenient means to define the chemical functionality presented at a surface.