Advanced laser microfabrication of photonic components

被引:20
作者
Herman, PR [1 ]
Chen, KP [1 ]
Corkum, P [1 ]
Naumov, A [1 ]
Ng, S [1 ]
Zhang, J [1 ]
机构
[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada
来源
1ST INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION | 2000年 / 4088卷
关键词
photosensitivity; refractive index; ultrafast lasers; F-2; lasers; optical waveguides;
D O I
10.1117/12.405727
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The powerful transition from electronic to photonic systems in today's internet-driven communication industry is driving the development of processes to miniaturize and integrate optical components. New processing and packaging technologies are now required that can precisely shape and assemble transparent optical components to sub-wavelength accuracy. Laser microfabrication technology is beginning to play a role here. Our groups are exploring two extremes in laser technology - ultrafast lasers and very short wavelength F-2 lasers - to microstructure optical surfaces and to profile refractive-index structures inside transparent glasses. In this paper, we compare photosensitivity responses, spatial resolution, and processing windows for the deep-ultraviolet and ultrafast laser approaches, and discuss prospects for laser printing and trimming of optical waveguide components and circuits.
引用
收藏
页码:345 / 350
页数:6
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