Laser shaping of photonic materials: deep-ultraviolet and ultrafast lasers

被引：177

作者：

Herman, PR

Marjoribanks, RS

Oettl, A

Chen, K

Konovalov, I

Ness, S

机构：

[1] Univ Toronto, Dept Elect & Comp Engn, Toronto, ON M5S 3G4, Canada

[2] Univ Toronto, Dept Phys, Toronto, ON M5S 1A7, Canada

来源：

APPLIED SURFACE SCIENCE | 2000年 / 154卷

基金：

加拿大自然科学与工程研究理事会;

关键词：

laser micromachining; ablation; photosensitivity; ultrafast lasers; F-2-laser; photonics;

D O I：

10.1016/S0169-4332(99)00463-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Optical materials are especially challenging to process with conventional lasers simply because of their high transparency. We are exploiting two extremes in laser technology - ultrafast lasers and very short wavelength Fz lasers - to microsculpt surfaces and to control refractive index in transparent glasses. These lasers drive fundamentally different interactions, many-photon and 'big' photon, respectively, that offer distinct advantages and limitations for shaping photonic devices in fused silica. Comparisons of surface morphology, shock-induced microcracking, resolution, and photosensitivity responses are presented. (C) 2000 Published by Elsevier Science B.V. All rights reserved.

引用

收藏

页码：577 / 586

页数：10

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