Monte Carlo simulation of multiple and plural scattering in elastic recoil detection

被引:65
作者
Arstila, K [1 ]
Sajavaara, T [1 ]
Keinonen, J [1 ]
机构
[1] Univ Helsinki, Accelerator Lab, FIN-00014 Helsinki, Finland
基金
芬兰科学院;
关键词
TOF-ERDA; multiple and plural scattering; Monte Carlo simulations;
D O I
10.1016/S0168-583X(00)00435-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In heavy ion elastic recoil detection measurements, the multiple and plural scattering of in-going primary ions and out-coming recoiled atoms introduces a major problem for a reliable and accurate analysis of concentration distributions in samples. In this study, a Monte Carlo (MC) code including multiple and plural scattering has been developed for simulation of elastic recoil detection energy spectra. Simulated spectra are in a good agreement with experimental spectra. The influence of the multiple or plural scattering on the energy spectra is discussed. Applications of the MC approach in elastic recoil detection analysis are considered. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:163 / 172
页数:10
相关论文
共 27 条
[1]   SETUP FOR MATERIALS ANALYSIS WITH HEAVY-ION BEAMS AT THE MUNICH MP TANDEM [J].
ASSMANN, W ;
HARTUNG, P ;
HUBER, H ;
STAAT, P ;
STEFFENS, H ;
STEINHAUSEN, C .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 85 (1-4) :726-731
[2]   Unambiguous automatic evaluation of multiple Ion Beam Analysis data with Simulated Annealing [J].
Barradas, NP ;
Jeynes, C ;
Webb, RP ;
Kreissig, U ;
Grötzschel, R .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1999, 149 (1-2) :233-237
[3]   THE WIDTH OF AN RBS SPECTRUM - INFLUENCE OF PLURAL AND MULTIPLE-SCATTERING [J].
BAUER, P ;
STEINBAUER, E ;
BIERSACK, JP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 64 (1-4) :711-715
[4]   RUTHERFORD BACKSCATTERING BEYOND THE SINGLE SCATTERING MODEL [J].
BAUER, P ;
STEINBAUER, E ;
BIERSACK, JP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 79 (1-4) :443-445
[5]   A compact ΔE-Eres detector for elastic recoil detection with high sensitivity [J].
Bergmaier, A ;
Dollinger, G ;
Frey, CM .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1998, 136 :638-643
[6]   A POSITION-SENSITIVE TRANSMISSION TIME DETECTOR [J].
BUSCH, F ;
PFEFFER, W ;
KOHLMEYER, B ;
SCHULL, D ;
PUHLHOFFER, F .
NUCLEAR INSTRUMENTS & METHODS, 1980, 171 (01) :71-74
[7]   TIME-OF-FLIGHT SYSTEM FOR PROFILING RECOILED LIGHT-ELEMENTS [J].
GROLEAU, R ;
GUJRATHI, SC ;
MARTIN, JP .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :11-15
[8]  
HAUTALA M, 1984, PHYS REV B, V30, P711
[9]   The effects of large angle plural scattering on heavy ion elastic recoil detection analysis [J].
Johnston, PN ;
Franich, RD ;
Bubb, IF ;
El Bouanani, M ;
Cohen, DD ;
Dytlewski, N ;
Siegele, R .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2000, 161 :314-317
[10]   Comparison of TOF-ERDA and nuclear resonance reaction techniques for range profile measurements of keV energy implants [J].
Jokinen, J ;
Keinonen, J ;
Tikkanen, P ;
Kuronen, A ;
Ahlgren, T ;
Nordlund, K .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 119 (04) :533-542