Water-based synthesis of La0,5Sr0,5CoO3 (LSCO) electrodes for ferroelectric thin films

被引:8
作者
Javoric, S [1 ]
Kosec, M [1 ]
Malic, B [1 ]
机构
[1] Josef Stefan Inst, Ljubljana 1000, Slovenia
关键词
La0,5Sr0,5CoO3 (LSCO); ferroelectric thin films; conducting oxide electrodes; chemical solution deposition (CSD);
D O I
10.1080/10584580008222280
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
La0.5Sr0.5CoO3 (LSCO) thin films were prepared from water solutions of lanthanum nitrate La(NO3)(3)x6H(2)O, strontium nitrate Sr(NO3)(2) and cobalt nitrate Co(NO3)(2)x6H(2)O with different amounts of polyvinylalcohol (PVA). Thin films were deposited on platinum coated and thermally oxidized silicon substrates. The influence of the amount of PVA on the thermal decomposition of LSCO precursors, the surface wetting and the microstructure of LSCO thin films were investigated. The effort was also focused on the optimization of the thermal treatment to obtain dense LSCO thin films.
引用
收藏
页码:309 / 316
页数:8
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