Nanosized tin oxide sensitive layer on a silicon platform for domestic gas applications

Micromachined silicon platforms have been specially created to be coated with a drop of tin oxide sensitive layer. Design of the silicon substrate includes a thin dielectric membrane for mechanical and thermal insulation purpose. A passivation layer covers the silicon front side structures except bonding pads and sensitive layer contacts and allows an easy drop deposition (no short circuit risk with heater electrode). The deposition material is a suspension of tin dioxide nanoparticles mixed in a solvent. A novel drop deposition technique is used and first characterizations under CO and CH4 gases are related and show high sensitivity and reliability level. (C) 2001 Elsevier Science B.V. All rights reserved.