Growth of high-quality ZnMgO epilayers and ZnO/ZnMgO quantum well structures by radical-source molecular-beam epitaxy on sapphire -: art. no. 091903

被引:113
作者
Sadofev, S [1 ]
Blumstengel, S [1 ]
Cui, J [1 ]
Puls, J [1 ]
Rogaschewski, S [1 ]
Schäfer, P [1 ]
Sadofyev, YG [1 ]
Henneberger, F [1 ]
机构
[1] Humboldt Univ, Inst Phys, D-12489 Berlin, Germany
关键词
D O I
10.1063/1.2034113
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on a specific growth procedure combining low-temperature growth of ZnMgO and postgrowth annealing at intermediate temperatures. Despite the large lattice misfit induced by the sapphire substrate, layer-by-layer growth is accomplished up to the phase-separation limit found at a c-lattice constant of 0.5136 nm and Mg mole fraction of 0.40. The procedure allows us to grow quantum wells with atomically smooth interfaces in a wide range of structural designs exhibiting prominent emission features up to room temperature.
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页数:3
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共 17 条
[1]   Infrared dielectric functions and phonon modes of wurtzite MgxZn1-xO (x≤0.2) [J].
Bundesmann, C ;
Schubert, M ;
Spemann, D ;
Butz, T ;
Lorenz, M ;
Kaidashev, EM ;
Grundmann, M ;
Ashkenov, N ;
Neumann, H ;
Wagner, G .
APPLIED PHYSICS LETTERS, 2002, 81 (13) :2376-2378
[2]   Layer-by-layer growth of ZnO epilayer on Al2O3(0001) by using a MgO buffer layer [J].
Chen, YF ;
Ko, HJ ;
Hong, SK ;
Yao, T .
APPLIED PHYSICS LETTERS, 2000, 76 (05) :559-561
[3]   Plasma-assisted molecular beam epitaxy for ZnO based II-VI semiconductor oxides and their heterostructures [J].
Chen, YF ;
Ko, HJ ;
Hong, SK ;
Sekiuchi, T ;
Yao, T ;
Segawa, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (03) :1514-1517
[4]   ZnMgO epilayers and ZnO-ZnMgO quantum wells for optoelectronic applications in the blue and UV spectral region [J].
Gruber, T ;
Kirchner, C ;
Kling, R ;
Reuss, F ;
Waag, A .
APPLIED PHYSICS LETTERS, 2004, 84 (26) :5359-5361
[5]   Piezoelectric carrier confinement by lattice mismatch at ZnO/Zn0.6Mg0.4O heterointerface [J].
Koike, K ;
Hama, K ;
Nakashima, I ;
Takada, G ;
Ozaki, M ;
Ogata, K ;
Sasa, S ;
Inoue, M ;
Yano, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2004, 43 (10B) :L1372-L1375
[6]   Room-temperature luminescence of excitons in ZnO/(Mg, Zn)O multiple quantum wells on lattice-matched substrates [J].
Makino, T ;
Chia, CH ;
Tuan, NT ;
Sun, HD ;
Segawa, Y ;
Kawasaki, M ;
Ohtomo, A ;
Tamura, K ;
Koinuma, H .
APPLIED PHYSICS LETTERS, 2000, 77 (07) :975-977
[7]   Optical properties of excitons in ZnO-based quantum well heterostructures [J].
Makino, T ;
Segawa, Y ;
Kawasaki, M ;
Koinuma, H .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (04) :S78-S91
[8]   Band gap engineering based on MgxZn1-xO and CdyZn1-yO ternary alloy films [J].
Makino, T ;
Segawa, Y ;
Kawasaki, M ;
Ohtomo, A ;
Shiroki, R ;
Tamura, K ;
Yasuda, T ;
Koinuma, H .
APPLIED PHYSICS LETTERS, 2001, 78 (09) :1237-1239
[9]   ZnO and ZnMgO growth on a-plane sapphire by molecular beam epitaxy [J].
Ogata, K ;
Koike, K ;
Tanite, T ;
Komuro, T ;
Yan, F ;
Sasa, S ;
Inoue, M ;
Yano, M .
JOURNAL OF CRYSTAL GROWTH, 2003, 251 (1-4) :623-627
[10]   Pulsed laser deposition of thin films and superlattices based on ZnO [J].
Ohtomo, A ;
Tsukazaki, A .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (04) :S1-S12