Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrument

被引：14

作者：

Bi, J

Jiang, XR

Kruit, P

机构：

[1] Delft University of Technology, Department of Applied Physics, 2628 CJ Delft

来源：

MICROELECTRONIC ENGINEERING | 1997年 / 35卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(96)00180-3

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The impact of Coulomb effects on the resolution of a focussed ion beam instrument is demonstrated by making use of both theoretical and experimental approaches. The calculated probe size is in reasonable agreement with the measured probe size at different operation modes of the machine. It is shown in this paper how the lens aberrations and Coulomb interactions play different roles at different magnifications and what the main problems in determining the probe size are.

引用

页码：439 / 442

页数：4

共 11 条

[1]

Barth JE, 1996, OPTIK, V101, P101

[2] BEAM INTERACTIONS IN A FOCUSED ION-BEAM SYSTEM WITH A LIQUID-METAL ION-SOURCE [J].