Adsorption of alkyl-trichlorosilanes on glass and silicon: A comparative study using sum-frequency spectroscopy and XPS

被引：24

作者：

Lobau, J

Rumphorst, A

Galla, K

Seeger, S

Wolfrum, K

机构：

[1] TECH UNIV MUNICH,DEPT PHYS E11,D-85748 GARCHING,GERMANY

[2] UNIV HEIDELBERG,INST PHYS CHEM,D-69120 HEIDELBERG,GERMANY

来源：

THIN SOLID FILMS | 1996年 / 289卷 / 1-2期

关键词：

chemisorption; infrared spectroscopy; surface phonons and adsorbate vibrations; X-ray photoelectron spectroscopy;

D O I：

10.1016/S0040-6090(96)08925-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Chemisorbed films of octadecyltrichlorosilane and propyltrichlorosilane on glass have been studied in a natural laboratory environment. Information on the molecular conformation and orientation is obtained from sum-frequency spectroscopy (SFS). The cleaning procedure preceding the coating process was monitored by SFS and X-ray photoelectron spectroscopy. In-situ monitoring of surface contaminations under normal atmospheric conditions by SFS provides valuable information on the effectiveness of cleaning and activation procedures.

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收藏

页码：272 / 281

页数：10

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