Influence of various nickel under-layers on the corrosion behaviour of AlN films deposited by reactive sputtering

被引:23
作者
Vacandio, F
Massiani, Y
Eyraud, M
Rossi, S
Fedrizzi, L
机构
[1] Univ Aix Marseille 1, UMR MADIREL, F-13331 Marseille 3, France
[2] Univ Trent, Dept Mat Engn, Trento, Italy
[3] Univ Roma La Sapienza, Dept ICMMPM, Rome, Italy
关键词
aluminium nitride; reactive sputtering; corrosion resistance; under-layers; nickel;
D O I
10.1016/S0257-8972(00)01110-5
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Aluminium nitride films were deposited by reactive sputtering on steel substrates (H11) with the aim of realizing anti-corrosion coatings. Electrochemical impedance spectroscopy (EIS) tests performed in a 0.5-M NaCl solution showed a good corrosion resistance of the films, which, however, decreased drastically with immersion time. The relatively weak thickness (1 mum) of the AlN films combined with their columnar structure [observed by scanning electron microscopy (SEM)] permits the pathway of the electrolyte to the steel substrate. In order to create a corrosion barrier between AlN and steel, two types of nickel under-layers (obtained by both electroless and electrochemical techniques) were investigated. All these samples were analysed by X-ray diffractometry (XRD), atomic force microscopy (AFM) and SEM. The Wurztite type hexagonal structure of AlN films remained unchanged despite the presence of a nickel under-layer. The electroless nickel samples have a micro crystalline structure and a flat surface,whereas the electrochemical coatings are well crystallized and present a relatively high roughness. During the deposition of AW on electroless nickel a structural transition occurs, with the precipitation of a Ni3P phase, well known to enhance the hardness of the samples. EIS measurements pointed out the synergetic effect obtained by the combination of an AlN coating with a nickel under-layer, leading to impedance values superior to the sum of the two effects considered separately. The AIN sample with an electroless nickel under-layer presents the best corrosion resistance with time. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:284 / 292
页数:9
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