Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring

被引：5

作者：

Ji, CH

Kim, YK

Chung, GB

机构：

[1] Seoul Natl Univ, Sch Elect & Comp Engn, Seoul 151742, South Korea

[2] Hongik Univ, Sch Elect Elect & Comp Engn, Jochiwon 339701, Chungnam, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 12B期

关键词：

MOEMS; electromagnetic micromirror; surface micromachining; bulk micromachining; parylene C; DRIE;

D O I：

10.1143/JJAP.39.7138

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have designed and fabricated an electromagnetic micromirror with a flat mirror plate capable of large angular deflection. Single-crystal silicon is used as a mirror plate to obtain an optically flat reflective surface. By a combination of surface and bulk micromachining processes, the single-crystal silicon mirror plate is connected to the substrate via an aluminum spring, which occupies a relatively small area without compromising the compliance. The proposed fabrication process can be applied to the fabrication of devices in which a flat moving part is supported by a compliant spring structure. Nickel electroplated onto the mirror plate enables a mirror rotation angle of up to 84.8 degrees by applying an external magnetic field vertical to the substrate. This designed structure can be used individually or as an array in microphotonic applications.

引用

页码：7138 / 7141

页数：4

共 9 条

[1]

CHUNG SW, 1999, P MICR OPT EL MECH S, P49

[2]

JUDY JW, 1995, 8 INT C SOL STAT SEN, V1, P332

[3]

Micromachined electromagnetic scanning mirrors [J].

Miller, RA ;

Tai, YC .

OPTICAL ENGINEERING, 1997, 36 (05) :1399-1407

[4]

MILLER RA, 1996, SOL STAT SENS ACT WO, P183

[5]

Monk DJ, 1997, SENSOR MATER, V9, P307

[6]

Nee J. T., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P704, DOI 10.1109/MEMSYS.2000.838604

[7]

Reliability test methods for media-compatible pressure sensors [J].