Angle resolved velocity distributions of sputtered aluminum atoms

被引：13

作者：

Goehlich, A

Dobele, HF

机构：

[1] Institut f. Laser-u. Plasmaphysik, Universität GH Essen, 45117 Essen

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 115卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)01448-9

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Measurements of angle resolved velocity distributions of sputtered aluminum atoms using the laser Doppler-shift method are reported. An aluminum target is bombarded by 3 keV (0.5 keV) argon ions. The emitted atoms are excited with pulsed dye laser radiation around lambda = 257 nm. The detection of the fluorescence light at lambda approximate to 396 nm is performed by the photon counting technique. Rotating the ion gun-target assembly with respect to the laser beam and observation optics allows to determine angle resolved velocity distributions. Significant deviations from the Thompson distribution are found at large angles of incidence. Absolute sputter yields are determined by the Rayleigh calibration technique.

引用

页码：489 / 492

页数：4

共 9 条

[1]

ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1

[2]

BOGEN P, 1983, P 17 INT C PHEN ION

[3] VELOCITY DISTRIBUTIONS OF THE METAL ATOMS SPUTTERED FROM OXYGEN AND NITROGEN COVERED TI-SURFACE AND AL-SURFACE [J].