Electrostatic microactuator and design considerations for HDD applications

被引：36

作者：

Fan, LS

Hirano, T

Hong, J

Webb, PR

Juan, WH

Lee, WY

Chan, S

Semba, T

Imaino, W

Pan, TS

Pattanaik, S

Lee, FC

McFadyen, I

Arya, S

Wood, R

机构：

[1] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

[2] IBM Corp, Storage Syst Div, San Jose, CA 95193 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1999年 / 35卷 / 02期

关键词：

electrostatic microactuator; hard disk drive; high track density;

D O I：

10.1109/20.753823

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). it is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design: The micro-actuator is demonstrated in a 3.5 " form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities.

引用

页码：1000 / 1005

页数：6

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