High-Resolution Direct Patterning of Gold Nanoparticles by the Microfluidic Molding Process

被引:31
作者
Demko, Michael T. [1 ,2 ]
Cheng, Jim C. [1 ,3 ]
Pisano, Albert P. [1 ,2 ,3 ]
机构
[1] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
[3] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA
关键词
ELECTRONICS;
D O I
10.1021/la1022533
中图分类号
O6 [化学];
学科分类号
070301 [无机化学];
摘要
A novel microfluidic molding process was used to form microscale features of gold nanoparticles on polyimide. glass. and silicon substrates. This technique uses permeation pumping to pattern and concentrate a nanoparticle ink inside microfluidic channels created in a porous polymer template in contact with a substrate. The nanoparticle ink is self-concentrated in the microchannels, resulting in dense, close-packed nanoparticle features. The method allows for better control over the structure of printed features at a resolution that is comparable to inkjet printing, and is purely additive with no residual layers or etching required. The process uses low temperatures and pressures and takes place in an ambient environment. After patterning, the gold nanoparticles were sintered into continuous and conductive gold traces.
引用
收藏
页码:16710 / 16714
页数:5
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