ZnO nanowire network transistor fabrication on a polymer substrate by low-temperature, all-inorganic nanoparticle solution process

被引:94
作者
Ko, Seung H. [1 ]
Park, Inkyu [1 ]
Pan, Heng [1 ]
Misra, Nipun [1 ]
Rogers, Matthew S. [1 ]
Grigoropoulos, Costas P. [1 ]
Pisano, Albert P. [1 ]
机构
[1] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2908962
中图分类号
O59 [应用物理学];
学科分类号
摘要
All-solution processed, low-temperature zinc oxide nanowire network transistor fabrication on a polymer substrate was demonstrated. This simple process can produce high resolution metal electrode transistors with inorganic semiconductor nanowire active material in a fully maskless sequence, eliminating the need for lithographic and vacuum processes. The temperature throughout the processing was under 140 degrees C, which will enable further applications to electronics on low-cost, large-area flexible polymer substrates. (C) 2008 American Institute of Physics.
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页数:3
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