Guided-wave acoustooptic interaction with phase modulation in a ZnO thin-film transducer on an Si-based integrated Mach-Zehnder interferometer

被引：30

作者：

Bonnotte, E ^{[1
]}

Gorecki, C

Toshiyoshi, H

Kawakatsu, H

Fujita, H

Wörhoff, K

Hashimoto, K

机构：

[1] Univ Tokyo, Inst Ind Sci, CNRS, LIMMS, Tokyo 1068558, Japan

[2] Univ Twente, Dept Appl Phys, NL-7500 Enschede, Netherlands

[3] Chiba Univ, Fac Engn, Chiba 260, Japan

来源：

JOURNAL OF LIGHTWAVE TECHNOLOGY | 1999年 / 17卷 / 01期

关键词：

acoustooptic modulation; micro-opto-electromechanical systems (MOEMS); optical interferometry; optical strip waveguides; surface acoustic waves;

D O I：

10.1109/50.737419

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design and the realization of a novel integrated Mach-Zehnder interferometer (MZI) with heterodyne schema. Well-controlled machining as well as ZnO thin-film transducer integration on the same Si substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation. Theoretical and experimental results are presented, demonstrating that an efficient sensor can be designed and fabricated.

引用

页码：35 / 42

页数：8

共 12 条

[1] INTEGRATED-OPTICS COMBINED WITH MICROMECHANICS ON SILICON [J].

BEZZAOUI, H ;

VOGES, E .

SENSORS AND ACTUATORS A-PHYSICAL, 1991, 29 (03) :219-223

[2] Silicon-based integrated interferometer with phase modulation driven by surface acoustic waves [J].

Gorecki, C ;

Chollet, F ;

Bonnotte, E ;

Kawakatsu, H .

OPTICS LETTERS, 1997, 22 (23) :1784-1786

[3]

GORECKI C, 1998, Patent No. 09023514

[4]

HICKERNELL FS, 1973, J APPL PHYS, V44, P1061, DOI 10.1063/1.1662307

[5]

HUNSPERGER RG, 1991, INTEGRATED OPTICS TH, P124

[6] THEORY OF INTERDIGITAL COUPLERS ON NONPIEZOELECTRIC SUBSTRATES [J].

KINO, GS ;

WAGERS, RS .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (04) :1480-1488

[7]

PETERS D, 1991, SENSOR ACTUAT A-PHYS, V25, P425

[8] GUIDE LINES FOR SELECTION OF ACOUSTOOPTIC MATERIALS [J].

PINNOW, DA .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1970, QE 6 (04) :223-&

[9] ACOUSTIC SURFACE WAVES ON ISOPAUSTIC GLASS [J].

SANDBANK, CP ;

BUTLER, MBN .

ELECTRONICS LETTERS, 1971, 7 (17) :499-&

[10] ANALYSIS OF INTERDIGITAL SURFACE WAVE TRANSDUCER BY USE OF AN EQUIVALENT CIRCUIT MODEL [J].

SMITH, WR ;

GERARD, HM ;

COLLINS, JH ;

REEDER, TM ;

SHAW, HJ .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1969, MT17 (11) :856-+

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