Photophysical ablation of organic polymers: The influence of stresses

被引:12
作者
Lukyanchuk, B
Bityurin, N
Anisimov, S
Malyshev, A
Arnold, N
Bauerle, D
机构
[1] JOHANNES KEPLER UNIV,A-4040 LINZ,AUSTRIA
[2] RUSSIAN ACAD SCI,INST GEN PHYS,MOSCOW 117942,RUSSIA
[3] RUSSIAN ACAD SCI,INST PHYS APPL,NIZHNII NOVGOROD 603600,RUSSIA
[4] RUSSIAN ACAD SCI,LANDAU INST THEORET PHYS,MOSCOW 117940,RUSSIA
基金
以色列科学基金会; 俄罗斯基础研究基金会;
关键词
D O I
10.1016/S0169-4332(96)00366-2
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Non-stationary effects and the influence of mechanical stresses during ns and ps UV excimer laser ablation of organic polymers are discussed, Direct comparison of theoretical calculations with experimental data for laser ablation of polyimide at different wavelengths shows that the photophysical ablation model describes the kinetics of ns UV laser ablation reasonably well. Small gaseous fragments produced within the bulk polymer may be responsible for the mass losses observed near the ablation threshold. At higher fluences, stresses caused by these fragments may facilitate photophysical ablation. With ps laser pulses, acoustic waves related to transient thermal stresses lead to additional defect formation.
引用
收藏
页码:120 / 125
页数:6
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