Growth of thin films of Co3O4 by atomic layer deposition

被引：88

作者：

Klepper, K. B. ^{[1
]}

Nilsen, O. ^{[1
]}

Fjellvag, H. ^{[1
]}

机构：

[1] Univ Oslo, Dept Chem, Ctr Mat Sci & Nanotechnol, N-0315 Oslo, Norway

来源：

THIN SOLID FILMS | 2007年 / 515卷 / 20-21期

关键词：

cobalt oxide; Atomic layer deposition (ALD); Atomic layer epitaxy (ALE); Atomic layer chemical vapour deposition (ALCVD);

D O I：

10.1016/j.tsf.2007.03.182

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of cobalt oxide were made by atomic layer deposition (ALD), using Co(thd)(2) (Hthd = 2,2,6,6-tetramethylheptan-3,5-dione) and ozone as precursors. Films were deposited on soda-lime glass and single crystals of Si(100). Pulse and purge parameters for ALD-type growth were established and such growth was found to occur for depositions within the temperature range of 114-307 degrees C. A preferred (100)-orientation was observed at the low end of the temperature range for films deposited on soda-lime glass and Si(100). At the high end of the temperature range, films deposited on Si(100) showed (111)-oriented growth, while films deposited on soda-lime glass substrates were unoriented. The electrical resistivity of as-deposited films on soda-lime glass were in the range of 0.13-4.48 ohm cm and showed a non-monotonic dependence on film thickness, with a minimum for films with a large proportion of grain boundaries. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：7772 / 7781

页数：10

共 49 条

[1] [Anonymous], 1994, UNIQUANT VERSION 2 U
[2] Magnetic behavior of cobalt oxide films prepared by pulsed liquid injection chemical vapor deposition from a metal-organic precursor
Apátiga, LM
Castaño, VM
[J]. THIN SOLID FILMS, 2006, 496 (02) : 576 - 579
[3] ARAKAWA T, 1993, PROPERTIES APPL PERO, P361
[4] Nanoscale cobalt oxides thin films obtained by CVD and sol-gel routes
Armelao, L
Barreca, D
Gross, S
Tondello, E
[J]. JOURNAL DE PHYSIQUE IV, 2001, 11 (PR3): : 437 - 444
[5] Cobalt oxide films grown by a dipping sol-gel process
Barrera, E
Viveros, T
Avila, A
Quintana, P
Morales, M
Batina, N
[J]. THIN SOLID FILMS, 1999, 346 (1-2) : 138 - 144
[6] Growth kinetics, composition, and morphology of CO3O4 thin films prepared by pulsed liquid-injection MOCVD
Burriel, M
Garcia, G
Santiso, J
Abrutis, A
Saltyte, Z
Figueras, A
[J]. CHEMICAL VAPOR DEPOSITION, 2005, 11 (02) : 106 - 111
[7] CO3O4 protective coatings prepared by Pulsed Injection Metal Organic Chemical Vapour Deposition
Burriel, M
García, G
Santiso, J
Hansson, AN
Linderoth, S
Figueras, A
[J]. THIN SOLID FILMS, 2005, 473 (01) : 98 - 103
[8] Spin valves using insulating cobalt ferrite exchange-spring pinning layers
Carey, MJ
Maat, S
Rice, P
Farrow, RFC
Marks, RF
Kellock, A
Nguyen, P
Gurney, BA
[J]. APPLIED PHYSICS LETTERS, 2002, 81 (06) : 1044 - 1046
[9] Metal-bonded Co-ferrite composites for magnetostrictive torque sensor applications
Chen, Y
Snyder, JE
Schwichtenberg, CR
Dennis, KW
McCallum, RW
Jiles, DC
[J]. IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) : 3652 - 3654
[10] THE OPTICAL-PROPERTIES OF SPUTTERED CO3O4 FILMS
COOK, JG
VANDERMEER, MP
[J]. THIN SOLID FILMS, 1986, 144 (02) : 165 - 176

← 1 2 3 4 5 →