Effect of collisionless heating on electron energy distribution in an inductively coupled plasma

被引：125

作者：

Godyak, VA

Kolobov, VI

机构：

[1] OSRAM SYLVANIA Dev Inc, Beverly, MA 01915 USA

[2] CFD Res Corp, Huntsville, AL 35805 USA

来源：

PHYSICAL REVIEW LETTERS | 1998年 / 81卷 / 02期

关键词：

D O I：

10.1103/PhysRevLett.81.369

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Significant frequency dependence of the electron energy distribution has been found in a low-pressure inductive discharge experiment. The observed frequency dependence reveals The presence of collisionless electron heating and appears as a result of finite electron-transit time through the skin layer. The energy distributions;calculated from a kinetic equation accounting for nonlocality of electron kinetics and electrodynamics are in good agreement with the experiment.

引用

页码：369 / 372

页数：4

共 19 条

[11]

GODYAK VA, 1998, ELECT KINETICS GLOW

[12] Stochastic electron heating in bounded radio-frequency plasmas [J].