Sol-gel prepared MoO3-WO3 thin-films for O2 gas sensing

被引：104

作者：

Galatsis, K

Li, YX

Wlodarski, W

Kalantar-zadeh, K

机构：

[1] Royal Melbourne Inst Technol, Sch Elect & Comp Syst Engn, Sensor Technol Lab, Melbourne, Vic 3001, Australia

[2] SICCAS, Lab Inorgan Funct Mat, Shanghai 20005, Peoples R China

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 77卷 / 1-2期

关键词：

molybdenum; tungsten; sol-gel; gas sensors; thin-film;

D O I：

10.1016/S0925-4005(01)00738-9

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Oxygen gas sensing properties of molybdenum trioxide and tungsten trioxide (MoO3-WO3) mixed metal oxide thin-films are investigated. Various MoO3-WO3 ratio thin-film samples are deposited onto silicon (1 0 0) and sapphire substrates via the sol-gel route. SEM analysis showed the presence of MoO3 orthorhombic phase, abating as WO3 dominated the mixed system. MoO3-WO3 sensors exhibited a linear response to O-2 concentrations varying from 10 to 10,000 ppm. The MoO3-WO3 film response was stable and reproducible operating at an optimal temperature of 420 degreesC. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：478 / 483

页数：6

共 15 条

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