Growth of patterned nanopore arrays of anodic aluminum oxide

被引：42

作者：

Yan, JC ^{[1
]}

Rao, GVR

Barela, M

Brevnov, DA

Jiang, YB

Xu, HF

López, GP

Atanassov, PB

机构：

[1] Univ New Mexico, Dept Chem & Nucl Engn, Ctr Microengineered Mat, Albuquerque, NM 87131 USA

[2] Univ New Mexico, Dept Earth & Planetary Sci, Albuquerque, NM 87131 USA

来源：

ADVANCED MATERIALS | 2003年 / 15卷 / 23期

关键词：

D O I：

10.1002/adma.200305360

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A convenient and inexpensive procedure to fabricate highly ordered, patterned through-hole nanopore arrays with intermittent aluminum supports was developed. As such, silica was found to be an effective anodization barrier to generate patterned ordered nanopore arrays. This paper allows facile incorporation of AAO in a robust form into microdevices for microelectronics, microfluidics, and integrated optics.

引用

页码：2015 / 2018

页数：4

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