Optically, defined multifunctional patterning of photosensitive thin-film silica mesophases

被引:172
作者
Doshi, DA
Huesing, NK
Lu, MC
Fan, HY
Lu, YF
Simmons-Potter, K
Potter, BG
Hurd, AJ
Brinker, CJ
机构
[1] Univ New Mexico, Dept Chem & Nucl Engn, Albuquerque, NM 87106 USA
[2] Univ New Mexico, Ctr Microengineered Mat, Adv Mat Lab, Albuquerque, NM 87106 USA
[3] Univ New Mexico, Dept Chem, Albuquerque, NM 87131 USA
[4] Vienna Univ Technol, Inst Inorgan Chem, Vienna, Austria
[5] Appl Mat Inc, Santa Clara, CA 95054 USA
[6] Sandia Natl Labs, Albuquerque, NM 87185 USA
关键词
D O I
10.1126/science.290.5489.107
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Photosensitive films incorporating molecular photoacid generators compartmentalized within a silica-surfactant mesophase were prepared by an evaporation-induced self-assembly process. Ultraviolet exposure promoted localized acid-catalyzed siloxane condensation, which can be used for selective etching of unexposed regions; for "gray-scale" patterning of refractive index, pore size, surface area, and wetting behavior; and for optically defining a mesophase transformation (from hexagonal to tetragonal) within the film. The ability to optically define and continuously central both structure and function on the macro- and mesoscales is of interest for sensor arrays, nanoreactors, photonic and fluidic devices, and low-dielectric-constant films.
引用
收藏
页码:107 / 111
页数:5
相关论文
共 26 条
  • [1] Blanc D, 1999, ADV MATER, V11, P1508, DOI 10.1002/(SICI)1521-4095(199912)11:18<1508::AID-ADMA1508>3.0.CO
  • [2] 2-V
  • [3] Brinker CJ, 1999, ADV MATER, V11, P579, DOI 10.1002/(SICI)1521-4095(199905)11:7<579::AID-ADMA579>3.0.CO
  • [4] 2-R
  • [5] BRINKER CJ, 1995, ACCESS NANOPOROUS MA, P123
  • [6] BRINKER CJ, 1990, SOL GEL SCI, P139
  • [7] Ultraviolet light imprinted sol-gel silica glass low-loss waveguides for use at 1.55 mu m
    Coudray, P
    Chisham, J
    Andrews, MP
    Najafi, SI
    [J]. OPTICAL ENGINEERING, 1997, 36 (04) : 1234 - 1240
  • [8] DIARYLIODONIUM SALTS - NEW CLASS OF PHOTO-INITIATORS FOR CATIONIC POLYMERIZATION
    CRIVELLO, JV
    LAM, JHW
    [J]. MACROMOLECULES, 1977, 10 (06) : 1307 - 1315
  • [9] DOSHI DA, UNPUB
  • [10] Rapid prototyping of patterned functional nanostructures
    Fan, HY
    Lu, YF
    Stump, A
    Reed, ST
    Baer, T
    Schunk, R
    Perez-Luna, V
    López, GP
    Brinker, CJ
    [J]. NATURE, 2000, 405 (6782) : 56 - 60