Selective growth of ZnO nanoneedles on Si substrates by metalorganic chemical vapor deposition

被引：16

作者：

Tak, Y

Yong, KJ ^{[1
]}

Park, C

机构：

[1] POSTECH, Elect & Comp Engn Div, Dept Chem Engn, Pohang 790784, South Korea

[2] Yeungnam Univ, Sch Chem Engn & Technol, Kyungsan, Kyungbuk, South Korea

来源：

JOURNAL OF CRYSTAL GROWTH | 2005年 / 285卷 / 04期

基金：

新加坡国家研究基金会;

关键词：

characterization; nanostructure; metalorganic chemical vapor deposition; nanomaterials;

D O I：

10.1016/j.jcrysgro.2005.09.052

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

A high density of aligned ZnO nanoneedles was selectively grown on carbon-coat patterned Si substrates. The ZnO nanoneedles were synthesized by metalorganic chemical vapor deposition using diethylzinc and oxygen gas. The growth temperature was 480 degrees C. The grown ZnO nanoneedles had single crystalline atomic Structure and pure compositions with no any impurities. The nanoneedles showed a strong near-bandedge PL emission at 3.29 eV with no significant deep-level emission peaks. (c) 2005 Elsevier B.V. All rights reserved.

引用

收藏

页码：549 / 554

页数：6

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