Waveguide formation of KTiOPO4 by multienergy MeV He+ implantation

X-cut potassium titanyl phosphate (KTiOPO4 or KTP) was implanted by multienergy MeV He+ implantation with a total dose of 2 x 10(16) ions/cm(2) at liquid nitrogen temperature. The energy and dose used are as follows: 3.3 MeV and 2 x 10(15) ions/cm(2), 3.2 MeV and 4 x 10(15) ions/cm(2), 3.1 MeV and 4 x 10(15) ions/cm(2), and 3.0 MeV and 1.0 x 10(16) ions/cm(2) to reduce tunneling effect, The 22 dark modes were measured by the isosceles prism coupling method. The 15 bright modes were observed after 250 degrees C, 60 min annealing, The result shows that the waveguide formation of KTiOPO4 implanted by MeV He+ is not strongly dependent on the cut direction, which is different from the waveguide formation of KTiOPO4 by ion exchange process.