Growth of thin ZnO films from aqueous solutions in the presence of PMAA-graft-PEO copolymers

被引:22
作者
Hoffmann, RC
Jia, SJ
Bartolomé, JC
Fuchs, TM
Bill, J
Graat, PCJ
Aldinger, F
机构
[1] Univ Stuttgart, Max Planck Inst Met Forsch, Pulvermet Lab, D-70569 Stuttgart, Germany
[2] Univ Stuttgart, Inst Nichtmet Anorgan Mat, Pulvermet Lab, D-70569 Stuttgart, Germany
[3] Max Planck Inst Met Res, Dept Mittemeijer, Stuttgart, Germany
关键词
electron microscopy; spectroscopy; thin films; ZnO;
D O I
10.1016/S0955-2219(03)00033-5
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The deposition of homogeneous and adherent ZnO films on Si wafers by thermohydrolysis of zinc salts in aqueous solution is reported. Using a graft copolymer (polymethacrylic acid partially grafted with polyethylencoxide side chains) homogeneous films of nanosized particles on Si wafers with self-assembled monolayers (SAMs) were obtained. The addition of the polyelectrolyte is necessary to suppress the formation of undesired, larger zincite crystals, which form inevitably otherwise. Films grown at different growth rates were characterized by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Films that were obtained at high growth rates exhibit canyon-like morphology, whereas low growth rates yield uniform films with low surface roughness. According to X-ray Photoelectron Spectroscopy (XPS) a part of the polymer remains attached to the precipitated particles and can be removed by pyrolysis at about 723 K. (C) 2003 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:2119 / 2123
页数:5
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