Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders

被引：9

作者：

Brankovic, Z

Brankovic, G

Varela, JA

机构：

[1] UNESP, Inst Quim, BR-14801970 Araraquara, SP, Brazil

[2] Univ Belgrade, Fac Technol & Met, YU-11000 Belgrade, Serbia

[3] Univ Fed Sao Carlos, Dept Quim, BR-13565905 Sao Carlos, SP, Brazil

[4] Univ Belgrade, Ctr Multidisciplinary Studies, YU-11030 Belgrade, Serbia

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2004年 / 24卷 / 06期

基金：

巴西圣保罗研究基金会;

关键词：

films; microstructure-final; PZT; suspension;

D O I：

10.1016/S0955-2219(03)00541-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

PZT thin films of composition Pb(Zr0.52Ti0.48)O-3 were prepared by a novel method from the suspension of nanocrystalline PZT powders. The powders were obtained by mechanochemical synthesis. Films were deposited on silicon (100) and platinum covered silicon substrates (Pt (111) /Ti/SiO2/Si) Using spin-on technique. Substrate type has influence on films crystallinity, orientation and can react with the films changing its phase composition. Films microstructure strongly depends on thermal treatment conditions due to phase and compositional changes of the films. (C) 2003 Elsevier Ltd. All rights reserved.

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页码：1945 / 1948

页数：4

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