optical switches;
integrated optics;
reactive ion etching;
semiconductor optical amplifiers;
D O I:
10.1049/el:19960054
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Waveguide integrated 2x2 InGaAsP laser amplifier gale switch arrays were fabricated using MOVPE and RIE. For the first time, RIE was applied as an etching process for the butt-coupling of the amplifier and the waveguide. A very low fibre-to-fibre loss of 1.2dB was obtained, and the on/off extinction ratio exceeded 42dB.