Patterned aluminum nanowires produced by electron beam at the surfaces of AlF3 single crystals

被引：14

作者：

Ma, C ^{[1
]}

Berta, Y ^{[1
]}

Wang, ZL ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA

来源：

SOLID STATE COMMUNICATIONS | 2004年 / 129卷 / 10期

基金：

美国国家航空航天局;

关键词：

AlF3; nanostructures;

D O I：

10.1016/j.ssc.2003.08.015

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Cubic- and rectangular-shape single crystals of alpha-AlF3 in sizes of 5-50 mum have been synthesized by a solid-vapor phase process. Using the electron beam induced decomposition of AlF3, a method is demonstrated for fabricating patterned aluminum nanowires in AlF3 substrate in a scanning electron microscope. By controlling the accelerating voltage, the beam current and scanning time, it is possible to fabricate metallic nanowires of different sizes. The aluminum nanowires may act as nano-interconnects for nanoelectronics. This work demonstrates a potential technique for e-beam nanofabrication. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：681 / 685

页数：5

共 17 条

[1] Preparation and characterization of different phases of aluminum trifluoride [J].

Alonso, C ;

Morato, A ;

Medina, F ;

Guirado, F ;

Cesteros, Y ;

Salagre, P ;

Sueiras, JE ;

Terrado, R ;

Giralt, A .

CHEMISTRY OF MATERIALS, 2000, 12 (04) :1148-1155

[2] Field-effect transistors based on single semiconducting oxide nanobelts [J].

Arnold, MS ;

Avouris, P ;

Pan, ZW ;

Wang, ZL .

JOURNAL OF PHYSICAL CHEMISTRY B, 2003, 107 (03) :659-663

[3] Electron-beam induced crystallization transition in self-developing amorphous AlF3 resists [J].

Chen, GS ;

Boothroyd, CB ;

Humphreys, CJ .

APPLIED PHYSICS LETTERS, 1996, 69 (02) :170-172

[4] Plasma-fluorination synthesis of high surface area aluminum trifluoride from a zeolite precursor [J].

Delattre, JL ;

Chupas, PJ ;

Grey, CP ;

Stacy, AM .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2001, 123 (22) :5364-5365

[5] Chemistry and physics in one dimension: Synthesis and properties of nanowires and nanotubes [J].

Hu, JT ;

Odom, TW ;

Lieber, CM .

ACCOUNTS OF CHEMICAL RESEARCH, 1999, 32 (05) :435-445

[6] Directed assembly of one-dimensional nanostructures into functional networks [J].

Huang, Y ;

Duan, XF ;

Wei, QQ ;

Lieber, CM .

SCIENCE, 2001, 291 (5504) :630-633

[7] Large-scale synthesis of aligned carbon nanotubes [J].

Li, WZ ;

Xie, SS ;

Qian, LX ;

Chang, BH ;

Zou, BS ;

Zhou, WY ;

Zhao, RA ;

Wang, G .

SCIENCE, 1996, 274 (5293) :1701-1703

[8] Membrane-based synthesis of nanomaterials [J].

Martin, CR .

CHEMISTRY OF MATERIALS, 1996, 8 (08) :1739-1746

[9]

Mbindyo JKN, 2001, ADV MATER, V13, P249, DOI 10.1002/1521-4095(200102)13:4<249::AID-ADMA249>3.0.CO

[10]

2-9

← 1 2 →