Micromachined devices for wireless communications

被引：325

作者：

Nguyen, CTC ^{[1
]}

Katehi, LPB ^{[1
]}

Rebeiz, GM ^{[1
]}

机构：

[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA

来源：

PROCEEDINGS OF THE IEEE | 1998年 / 86卷 / 08期

基金：

美国国家科学基金会; 美国国家航空航天局;

关键词：

acoustic resonators; antennas; filters; high-Q; IF; MEMS; micromachining; oscillators; phase noise; resonators; RF; switchers; synthesizers; thin-film inductors; transceivers; tunable; wireless;

D O I：

10.1109/5.704281

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q's in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and future wireless transceivers.

引用

页码：1756 / 1768

页数：13

共 54 条

[1] Direct-conversion radio transceivers for digital communications [J].

Abidi, AA .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1995, 30 (12) :1399-1410

[2]

Ahn C.H., 1993, 7TH P INT C SOL STAT, P70

[3] AN 86-106 GHZ QUASI-INTEGRATED LOW-NOISE SCHOTTKY RECEIVER [J].

ALIAHMAD, WY ;

BISHOP, WL ;

CROWE, TW ;

REBEIZ, GM .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1993, 41 (04) :558-564

[4]

Allen MG, 1997, ISCAS '97 - PROCEEDINGS OF 1997 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, VOLS I - IV, P2829, DOI 10.1109/ISCAS.1997.612914

[5] High frequency microelectromechanical IF filters [J].

Bannon, FD ;

Clark, JR ;

Nguyen, CTC .

IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996, 1996, :773-776

[6]

BLONDY P, 1998, IEEE INT MTT S S JUN

[7] Micromachined micropackaged filter banks [J].

Brown, AR ;

Rebeiz, GM .

IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1998, 8 (04) :158-160

[8]

BROWN AR, 1997, LOW LOSS MILLIMETER

[9] Conductor-loss limited stripline resonator and filters [J].

Chi, CY ;

Rebeiz, GM .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1996, 44 (04) :626-630

[10] PLANAR MICROWAVE AND MILLIMETER-WAVE LUMPED ELEMENTS AND COUPLED-LINE FILTERS USING MICROMACHINING TECHNIQUES [J].

CHI, CY ;

REBEIZ, GM .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1995, 43 (04) :730-738

← 1 2 3 4 5 6 →