Micromachined metal oxide gas sensors:: opportunities to improve sensor performance

被引：525

作者：

Simon, T

Bârsan, N

Bauer, M

Weimar, U

机构：

[1] Robert Bosch GmbH, Automot Equipment Div K8, D-72703 Reutlingen, Germany

[2] Inst Phys & Theoret Chem, D-72076 Tubingen, Germany

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2001年 / 73卷 / 01期

关键词：

micro gas sensors; micromachining; metal oxide;

D O I：

10.1016/S0925-4005(00)00639-0

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This review deals with gas sensors combining a metal oxide based sensing layer and a substrate realized by using micromachining. It starts by giving an overview of the design principles and technology involved in the fabrication of micromachined substrates examining thermal and mechanical aspects. Both kinds of micromachined substrates, closed-membrane-type and the suspended-membrane-type, are discussed. The deposition of the sensing layer is complicated by the mechanical fragility of the micromachined substrates. Different approaches used for the formation of the sensing layer such as thin film and thick film deposition techniques are reviewed. Finally, the gas sensing function of the sensitive layer is analyzed and various ways for extracting the information are: presented with respect to the improvement of sensor performance brought by this new approach. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 26

页数：26

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