A new silicon rate gyroscope

被引：41

作者：

Geiger, W ^{[1
]}

Folkmer, B ^{[1
]}

Merz, J ^{[1
]}

Sandmaier, H ^{[1
]}

Lang, W ^{[1
]}

机构：

[1] Hahn Schickard Gesellsch, Inst Micromachining & Informat Technol, HSG, IMIT, D-78052 Villingen Schwenningen, Germany

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 73卷 / 1-2期

关键词：

gyroscope; angular rate sensor; angular velocity;

D O I：

10.1016/S0924-4247(98)00253-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A new silicon rate gyroscope of small size, low cost, and high performance is described. The device is called MARS-RR, which means Micromachined Angular Rate Sensor with two Rotary oscillation modes. First prototypes, MARS-RR1 yielded random walk and bias stability as low as 0.14 deg/h and 65 deg/h, respectively. The rate equivalent rms noise corresponds to a resolution of 0.05 deg/s in a 50 Hz bandwidth. This performance is achieved by a new sensor design featuring decoupling of the actuation and the detection oscillation modes. Because of decoupling, the modes mechanical and electromechanical crosstalk, one main error source of micromachined gyros, can be reduced and therefore the zero rate output (ZRO) almost disappears. Despite the small sensor area of 6 mm(2), the detection capacitance amounts to approximately 3 pF. Thus, subatomic deflections are detectable and a high sensitivity is achieved. MARS-RR1 was manufactured within the Bosch Foundry process [M. Illing, Micromachining Foundry Designrules, Version 1.0, Bosch Mikroelektronik; M. Offenberg, H. Munzel, D. Schubert, B. Maihofer, F. Larmer, E. Muller, O. Schatz, J. Marek, SAE Technical Paper Series, 960758, SAE 96, The Engineering Society for Advancing Mobility Land Sea Air and Space, 1996, reprinted from Sensors and Actuators, 1996 (SP-1133), p. 35; M. Offenberg, F. Larmer, B. Elsner, H. Munzel, W. Riethmuller, Novel Process for a Monolithical Integrated Accelerometer, Transducer '95, Eurosensor IX, 148-C4, pp. 589-592] and therefore it was possible for us to reduce the development time considerably. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：45 / 51

页数：7

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