共 15 条
Electrical conduction transition and largely reduced leakage current in aluminum-doped barium strontium titanate thin films heteroepitaxially grown on Ir/MgO/Si(100)
被引:13
作者:

Chen, TL
论文数: 0 引用数: 0
h-index: 0
机构: Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

Li, XM
论文数: 0 引用数: 0
h-index: 0
机构: Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

Wu, WB
论文数: 0 引用数: 0
h-index: 0
机构: Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

Yu, WD
论文数: 0 引用数: 0
h-index: 0
机构: Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

Gao, XD
论文数: 0 引用数: 0
h-index: 0
机构: Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China

Zhang, X
论文数: 0 引用数: 0
h-index: 0
机构: Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
机构:
[1] Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Performance Ceram & Superfine, Shanghai 200050, Peoples R China
[2] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 201800, Peoples R China
基金:
中国国家自然科学基金;
关键词:
D O I:
10.1063/1.1896448
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
Ba0.6Sr0.4Ti1-xAlxO3 (BSTA, x=0, 3 at. %, 6 at. %) thin films have been prepared on Ir/MgO-buffered silicon substrates by pulsed-laser deposition. All-epitaxial growth of BSTA/Ir/MgO/Si heterostructures has been evidenced by x-ray diffraction and reflection high-energy electron diffraction. A large reduction in the leakage current density of BSTA thin films was observed by aluminum doping. For 3 at. % Al-doped BSTA thin films, the dominant conduction mechanism shows space-charge-limited current behavior at a low electric field, where the trap-filled limit field is determined as E-TFL = 10 KV/cm, while at a high electric field the Poole-Frenkel emission is operative. In contrast, the conduction mechanism for 6 at. % Al-doped BSTA thin film is dominated by field-enhanced Schottky emission. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
相关论文
共 15 条
[1]
Electrical conduction mechanism in high-dielectric-constant (Ba0.5,Sr0.5)TiO3 thin films
[J].
Chang, ST
;
Lee, JM
.
APPLIED PHYSICS LETTERS,
2002, 80 (04)
:655-657

Chang, ST
论文数: 0 引用数: 0
h-index: 0
机构:
Tsing Hua Univ, Dept Elect Engn, Hsinchu, Taiwan Tsing Hua Univ, Dept Elect Engn, Hsinchu, Taiwan

Lee, JM
论文数: 0 引用数: 0
h-index: 0
机构:
Tsing Hua Univ, Dept Elect Engn, Hsinchu, Taiwan Tsing Hua Univ, Dept Elect Engn, Hsinchu, Taiwan
[2]
Epitaxial growth of atomic-scale smooth Ir electrode films on MgO buffered Si(100) substrates by PLD
[J].
Chen, TL
;
Li, XM
;
Zhang, X
.
JOURNAL OF CRYSTAL GROWTH,
2004, 267 (1-2)
:80-84

Chen, TL
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Preformance Ceram & Superfine, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Preformance Ceram & Superfine, Shanghai 200050, Peoples R China

Li, XM
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Preformance Ceram & Superfine, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Preformance Ceram & Superfine, Shanghai 200050, Peoples R China

Zhang, X
论文数: 0 引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Preformance Ceram & Superfine, Shanghai 200050, Peoples R China Chinese Acad Sci, Shanghai Inst Ceram, State Key Lab High Preformance Ceram & Superfine, Shanghai 200050, Peoples R China
[3]
Metallization induced band bending of SrTiO3(100) and Ba0.7Sr0.3TiO3
[J].
Copel, M
;
Duncombe, PR
;
Neumayer, DA
;
Shaw, TM
;
Tromp, RM
.
APPLIED PHYSICS LETTERS,
1997, 70 (24)
:3227-3229

Copel, M
论文数: 0 引用数: 0
h-index: 0
机构: IBM Research Division, T. J. Watson Research Center, Yorktown Heights

Duncombe, PR
论文数: 0 引用数: 0
h-index: 0
机构: IBM Research Division, T. J. Watson Research Center, Yorktown Heights

Neumayer, DA
论文数: 0 引用数: 0
h-index: 0
机构: IBM Research Division, T. J. Watson Research Center, Yorktown Heights

Shaw, TM
论文数: 0 引用数: 0
h-index: 0
机构: IBM Research Division, T. J. Watson Research Center, Yorktown Heights

Tromp, RM
论文数: 0 引用数: 0
h-index: 0
机构: IBM Research Division, T. J. Watson Research Center, Yorktown Heights
[4]
Leakage currents in Ba0.7Sr0.3TiO3 thin films for ultrahigh-density dynamic random access memories
[J].
Dietz, GW
;
Schumacher, M
;
Waser, R
;
Streiffer, SK
;
Basceri, C
;
Kingon, AI
.
JOURNAL OF APPLIED PHYSICS,
1997, 82 (05)
:2359-2364

Dietz, GW
论文数: 0 引用数: 0
h-index: 0
机构:
N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695 N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

Schumacher, M
论文数: 0 引用数: 0
h-index: 0
机构:
N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695 N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

Waser, R
论文数: 0 引用数: 0
h-index: 0
机构:
N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695 N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

Streiffer, SK
论文数: 0 引用数: 0
h-index: 0
机构:
N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695 N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

Basceri, C
论文数: 0 引用数: 0
h-index: 0
机构:
N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695 N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695

Kingon, AI
论文数: 0 引用数: 0
h-index: 0
机构:
N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695 N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695
[5]
NONLINEAR ELECTRICAL-PROPERTIES OF LEAD-LANTHANUM-TITANATE THIN-FILMS DEPOSITED BY MULTI-ION-BEAM REACTIVE SPUTTERING
[J].
FOX, GR
;
KRUPANIDHI, SB
.
JOURNAL OF APPLIED PHYSICS,
1993, 74 (03)
:1949-1959

FOX, GR
论文数: 0 引用数: 0
h-index: 0
机构:
PENN STATE UNIV,MAT RES LAB,UNIV PK,PA 16802 PENN STATE UNIV,MAT RES LAB,UNIV PK,PA 16802

KRUPANIDHI, SB
论文数: 0 引用数: 0
h-index: 0
机构:
PENN STATE UNIV,MAT RES LAB,UNIV PK,PA 16802 PENN STATE UNIV,MAT RES LAB,UNIV PK,PA 16802
[6]
DIRECT-CURRENT CONDUCTION PROPERTIES OF SPUTTERED PT/(BA0.7SR0.3)TIO3/PT THIN-FILMS CAPACITORS
[J].
HSU, WY
;
LUTTMER, JD
;
TSU, R
;
SUMMERFELT, S
;
BEDEKAR, M
;
TOKUMOTO, T
;
NULMAN, J
.
APPLIED PHYSICS LETTERS,
1995, 66 (22)
:2975-2977

HSU, WY
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243

LUTTMER, JD
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243

TSU, R
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243

SUMMERFELT, S
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243

BEDEKAR, M
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243

TOKUMOTO, T
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243

NULMAN, J
论文数: 0 引用数: 0
h-index: 0
机构: TEXAS INSTRUMENTS INC,MAT SCI LAB,DALLAS,TX 75243
[7]
Composition-control of magnetron-sputter-deposited (BaxSr1-x)Ti1+yO3+z thin films for voltage tunable devices
[J].
Im, J
;
Auciello, O
;
Baumann, PK
;
Streiffer, SK
;
Kaufman, DY
;
Krauss, AR
.
APPLIED PHYSICS LETTERS,
2000, 76 (05)
:625-627

Im, J
论文数: 0 引用数: 0
h-index: 0
机构: Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

Auciello, O
论文数: 0 引用数: 0
h-index: 0
机构: Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

Baumann, PK
论文数: 0 引用数: 0
h-index: 0
机构: Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

Streiffer, SK
论文数: 0 引用数: 0
h-index: 0
机构: Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

Kaufman, DY
论文数: 0 引用数: 0
h-index: 0
机构: Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

Krauss, AR
论文数: 0 引用数: 0
h-index: 0
机构: Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA
[8]
Leakage current behaviors of acceptor- and donor-doped (Ba0.5Sr0.5)TiO3 thin films
[J].
Kim, SS
;
Park, C
.
APPLIED PHYSICS LETTERS,
1999, 75 (17)
:2554-2556

Kim, SS
论文数: 0 引用数: 0
h-index: 0
机构: Sunchon Natl Univ, Dept Met Engn & Mat Sci, Sunchon 540742, South Korea

Park, C
论文数: 0 引用数: 0
h-index: 0
机构: Sunchon Natl Univ, Dept Met Engn & Mat Sci, Sunchon 540742, South Korea
[9]
A review of high dielectric materials for DRAM capacitors
[J].
Kotecki, DE
.
INTEGRATED FERROELECTRICS,
1997, 16 (1-4)
:1-19

Kotecki, DE
论文数: 0 引用数: 0
h-index: 0
机构: IBM Microelectronics Division, Hopewell Junction, NY
[10]
CONDUCTION MECHANISMS IN BATIO3 THIN-FILMS
[J].
LI, P
;
LU, TM
.
PHYSICAL REVIEW B,
1991, 43 (17)
:14261-14264

LI, P
论文数: 0 引用数: 0
h-index: 0
机构:
RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12180 RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12180

LU, TM
论文数: 0 引用数: 0
h-index: 0
机构:
RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12180 RENSSELAER POLYTECH INST,CTR INTEGRATED ELECTR,TROY,NY 12180