Low temperature InOx thin films for O3 and NO2 gas sensing

被引：3

作者：

Kiriakidis, G ^{[1
]}

Ouacha, H ^{[1
]}

Katsarakis, N ^{[1
]}

Galatsis, K ^{[1
]}

Wlodarski, W ^{[1
]}

机构：

[1] Fdn Res & Technol Hellas, Inst Elect Struct & Laser, Iraklion 71110, Crete, Greece

来源：

SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2 | 2003年 / 5116卷

关键词：

thin films; InOx; transparent conducting films; TCO; gas sensors; ozone-nitrogen oxides detectors;

D O I：

10.1117/12.501464

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

The desirable electrical properties of InOX thin films and their response towards oxidizing gases has promoted InOX to be recognized as a promising material for gas sensors. In this study, InOX films in the thickness range of 10-1000 nm were deposited onto Coming 7059 glass substrates by dc magnetron sputtering. Their structural, electrical, and O-3 and NO2 sensing properties were analyzed. Structural investigations carried out by XRD and AFM showed a strong correlation between crystallinity, surface topology and gas sensitivity. Moreover, the electrical conductivity exhibited a change of over six orders of magnitude during the processes of photoreduction and oxidation. The films deposited on alumina transducers were calibrated towards O-3 and NO2 at temperatures from 50-300 degreesC. The sensors show promising characteristics as they exhibited reproducible and stable responses. The 50 run thin film had a response of over 10 towards 50 ppb of ozone operating at 50degreesC, while the 20 rim film had a response of over 22 towards 0.1 ppm of NO2 at 100degreesC.

引用

页码：84 / 91

页数：8

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