Effects of plasma ion implantation from cathodic arc plasmas

被引：7

作者：

Rother, B ^{[1
]}

Mucha, A ^{[1
]}

机构：

[1] MAT GmbH Dresden, D-01257 Dresden, Germany

来源：

SURFACE & COATINGS TECHNOLOGY | 2001年 / 142卷

关键词：

plasma ion implantation; cathodic arc plasmas;

D O I：

10.1016/S0257-8972(01)01050-7

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Plasma ion implantations from cathodic arc plasmas of the Ti-Si-N and Ti-B-N systems are performed into hardened high speed steel with pulsed bias voltages of -5 to -20 kV at working gas pressures of 10(-2) and 4 X 10(-3) mbar as well as at substrate temperatures of 200 and 300 degreesC. The samples are characterized by tribological investigations. Coatings deposited with substantially shuttered direct particle impact from the cathodic arc source show the highest wear resistance. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：402 / 405

页数：4

共 6 条

[1] Metal plasma immersion ion implantation and deposition: a review [J].