Growth-temperature dependence of the Li/Nb ratio in LPE-grown LiNbO3 films estimated by second-harmonic generation

被引：10

作者：

Kawaguchi, T

Imaeda, M

Ohuchi, R

Minakata, M

Taniuchi, T

Fukuda, T

机构：

[1] NGK INSULATORS LTD,MIZUHO KU,NAGOYA,AICHI 467,JAPAN

[2] TOHOKU UNIV,ELECT COMMUN RES INST,AOBA KU,SENDAI,MIYAGI 980,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1996年 / 166卷 / 1-4期

关键词：

D O I：

10.1016/0022-0248(95)00560-9

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

The relationship between the Li/Nb ratio of Liquid-phase epitaxial (LPE) grown LiNbO3 films and the growth temperature is investigated by means of second-harmonic generation measurements. Uniform 3-inch-wafer-size epitaxial films, which are available in conventional device fabrication processes, were successfully grown.

引用

收藏

页码：493 / 496

页数：4

相关论文

共 9 条

[1] NONSTOICHIOMETRY AND CRYSTAL GROWTH OF LITHIUM NIOBATE [J].

CARRUTHE.JR ;

PETERSON, GE ;

GRASSO, M ;

BRIDENBA.PM .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (05) :1846-+

[2] GROWTH AND INVESTIGATION OF MGO-DOPED LINBO3 [J].

GRABMAIER, BC ;

OTTO, F .

JOURNAL OF CRYSTAL GROWTH, 1986, 79 (1-3) :682-688

[3] LIQUID-PHASE EPITAXIAL-GROWTH AND CHARACTERIZATION OF LINBO3 SINGLE-CRYSTAL FILMS [J].

HIBIYA, T ;

SUZUKI, H ;

YONENAGA, I ;

KIMURA, S ;

KAWAGUCHI, T ;

SHISHIDO, T ;

FUKUDA, T .

JOURNAL OF CRYSTAL GROWTH, 1994, 144 (3-4) :213-217

[4] OPTICAL-PROPERTIES OF LITHIUM-RICH LITHIUM-NIOBATE FABRICATED BY VAPOR TRANSPORT EQUILIBRATION [J].

JUNDT, DH ;

FEJER, MM ;

BYER, RL .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1990, 26 (01) :135-138

[5] LINBO3 SINGLE-CRYSTAL GROWTH BY THE CONTINUOUS CHARGING CZOCHRALSKI METHOD WITH LI/NB RATIO CONTROL [J].

KAN, SJ ;

SAKAMOTO, M ;

OKANO, Y ;

HOSHIKAWA, K ;

FUKUDA, T .

JOURNAL OF CRYSTAL GROWTH, 1992, 119 (3-4) :215-220

[6] GROWTH OF HIGH CRYSTALLINE QUALITY LINBO3 THIN-FILMS BY A NEW LIQUID-PHASE EPITAXIAL TECHNIQUE FROM A SOLID-LIQUID COEXISTING MELT [J].

KAWAGUCHI, T ;

YOON, DH ;

MINAKATA, M ;

OKADA, Y ;

IMAEDA, M ;

FUKUDA, T .

JOURNAL OF CRYSTAL GROWTH, 1995, 152 (1-2) :87-93

[7] STOICHIOMETRIC LINBO3 SINGLE-CRYSTAL GROWTH BY DOUBLE CRUCIBLE CZOCHRALSKI METHOD USING AUTOMATIC POWDER SUPPLY-SYSTEM [J].

KITAMURA, K ;

YAMAMOTO, JK ;

IYI, N ;

KIMURA, S ;

HAYASHI, T .

JOURNAL OF CRYSTAL GROWTH, 1992, 116 (3-4) :327-332

[8] OPTICAL-ABSORPTION EDGE OF LINBO3 [J].

REDFIELD, D ;

BURKE, WJ .

JOURNAL OF APPLIED PHYSICS, 1974, 45 (10) :4566-4571

[9] LIQUID-PHASE EPITAXIAL-GROWTH OF LINBO3 THIN-FILM USING LI2O-B2O3 FLUX SYSTEM [J].

YAMADA, A ;

TAMADA, H ;

SAITOH, M .

JOURNAL OF CRYSTAL GROWTH, 1993, 132 (1-2) :48-60