Nanoindentation shape effect: experiments, simulations and modelling

被引:27
作者
Calabri, L.
Pugno, N.
Rota, A.
Marchetto, D.
Valeri, S.
机构
[1] CNR, INFM, Natl Res Ctr NanoStruct & BioSyst Surfaces S3, I-41100 Modena, Italy
[2] Politecn Torino, Dept Struct Engn, I-10129 Turin, Italy
[3] Univ Modena & Reggio Emilia, Dept Phys, I-41100 Modena, Italy
关键词
D O I
10.1088/0953-8984/19/39/395002
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
AFM nanoindentation is nowadays commonly used for the study of mechanical properties of materials at the nanoscale. The investigation of surface hardness of a material using AFM means that the probe has to be able to indent the surface, but also to image it. Usually standard indenters are not sharp enough to obtain high- resolution images, but on the other hand measuring the hardness behaviour of a material with a non- standard sharp indenter gives only comparative results affected by a significant deviation from the commonly used hardness scales. In this paper we try to understand how the shape of the indenter affects the hardness measurement, in order to find a relationship between the measured hardness of a material and the corner angle of a pyramidal indenter. To achieve this we performed a full experimental campaign, indenting the same material with three focused ion beam ( FIB) nanofabricated probes with a highly altered corner angle. We then compared the results obtained experimentally with those obtained by numerical simulations, using the finite element method ( FEM), and by theoretical models, using a general scaling law for nanoindentation available for indenters with a variable size and shape. The comparison between these three approaches ( experimental, numerical and theoretical approaches) reveals a good agreement and allowed us to find a theoretical relationship which links the measured hardness value with the shape of the indenter. The same theoretical approach has also been used to fit the hardness experimental results considering the indentation size effect. In this case we compare the measured data, changing the applied load.
引用
收藏
页数:12
相关论文
共 17 条
[1]   FINITE-ELEMENT SIMULATION OF INDENTATION EXPERIMENTS [J].
BHATTACHARYA, AK ;
NIX, WD .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1988, 24 (09) :881-891
[2]   NANOINDENTATION HARDNESS MEASUREMENTS USING ATOMIC-FORCE MICROSCOPY [J].
BHUSHAN, B ;
KOINKAR, VN .
APPLIED PHYSICS LETTERS, 1994, 64 (13) :1653-1655
[3]  
Bhushan B., 2004, SPRINGER HDB NANOTEC
[4]   SCALING LAWS AND RENORMALIZATION-GROUPS FOR STRENGTH AND TOUGHNESS OF DISORDERED MATERIALS [J].
CARPINTERI, A .
INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 1994, 31 (03) :291-302
[5]   A method for interpreting the data from depth-sensing indentation instruments [J].
Doerner, M. F. ;
Nix, W. D. .
JOURNAL OF MATERIALS RESEARCH, 1986, 1 (04) :601-609
[6]  
Fischer-Cripps A.C., 2004, NANOINDENTATION
[7]  
Li XD, 2002, MATER CHARACT, V48, P11, DOI 10.1016/S1044-5803(02)00192-4
[8]  
Nix WD, 1997, MAT SCI ENG A-STRUCT, V234, P37, DOI 10.1016/S0921-5093(97)00176-7
[9]   Indentation size effects in crystalline materials: A law for strain gradient plasticity [J].
Nix, WD ;
Gao, HJ .
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 1998, 46 (03) :411-425
[10]   Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology [J].
Oliver, WC ;
Pharr, GM .
JOURNAL OF MATERIALS RESEARCH, 2004, 19 (01) :3-20