Photopatternable imaging layers for controlling block copolymer microdomain orientation

被引：91

作者：

Han, Eungnak ^{[1
]}

In, Insik ^{[1
]}

Park, Sang-Min ^{[2
]}

La, Young-Hye ^{[2
]}

Wang, Yao ^{[1
]}

Nealey, Paul F. ^{[2
]}

Gopalan, Padma ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA

[2] Univ Wisconsin, Dept Biol & Chem Engn, Madison, WI 53706 USA

来源：

ADVANCED MATERIALS | 2007年 / 19卷 / 24期

关键词：

D O I：

10.1002/adma.200602708

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

An ultrathin photo-crosslinkable random copolymer film was designed as a substrate-independent imaging layer for block copolymer (BCP) thin films. Negative-tone resist chemistry was combined with the chemistry of neutral surfaces to formulate the imaging layer. The synthesis of the imaging layer, optimization of the photo-crosslinking conditions, and patterning of BCP thin films on the imaging layer is discussed. The mild room temperature crosslinking chemistry is especially attractive for BCPs containing temperature-sensitive monomers.

引用

页码：4448 / +

页数：6

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