Precise control over molecular dimensions of block-copolymer domains using the interfacial energy of chemically nanopatterned substrates

被引：242

作者：

Edwards, EW

Montague, MF

Solak, HH

Hawker, CJ

Nealey, PF ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Chem & Biol Engn, Madison, WI 53706 USA

[2] Univ Wisconsin, Ctr Nanotechnol, Madison, WI 53706 USA

[3] Paul Scherrer Inst, Lab Micro & Nanotechnol, CH-5232 Villigen, Switzerland

[4] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 15期

关键词：

D O I：

10.1002/adma.200400763

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Epitaxial assembly of block-copolymer films (see Figure) onto chemically nanopatterned substrates results in arrays of nanoscopic domains that are defect-free, oriented, and registered with the underlying substrate. The range of dimensions of features (or periodicity of structures) that can be patterned with perfection and registration strongly depends on the interfacial energy between the substrate and the polymer film.

引用

页码：1315 / +

页数：6

共 39 条

[1] Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication
Black, CT
Guarini, KW
Milkove, KR
Baker, SM
Russell, TP
Tuominen, MT
[J]. APPLIED PHYSICS LETTERS, 2001, 79 (03) : 409 - 411
[2] Fabrication of nanostructures with long-range order using block copolymer lithography
Cheng, JY
Ross, CA
Thomas, EL
Smith, HI
Vancso, GJ
[J]. APPLIED PHYSICS LETTERS, 2002, 81 (19) : 3657 - 3659
[3] Cheng JY, 2001, ADV MATER, V13, P1174, DOI 10.1002/1521-4095(200108)13:15<1174::AID-ADMA1174>3.0.CO
[4] 2-Q
[5] Microdomain patterns from directional eutectic solidification and epitaxy
De Rosa, C
Park, C
Thomas, EL
Lotz, B
[J]. NATURE, 2000, 405 (6785) : 433 - 437
[6] Two-dimensional block copolymer photonic crystals
Deng, T
Chen, CT
Honeker, C
Thomas, EL
[J]. POLYMER, 2003, 44 (21) : 6549 - 6553
[7] Dependence of the glass transition temperature of polymer films on interfacial energy and thickness
Fryer, DS
Peters, RD
Kim, EJ
Tomaszewski, JE
de Pablo, JJ
Nealey, PF
White, CC
Wu, WL
[J]. MACROMOLECULES, 2001, 34 (16) : 5627 - 5634
[8] GUARINI KW, 2003, INT EL DEV M, P1
[9] Well-defined random copolymers by a ''living'' free-radical polymerization process
Hawker, CJ
Elce, E
Dao, JL
Volksen, W
Russell, TP
Barclay, GG
[J]. MACROMOLECULES, 1996, 29 (07) : 2686 - 2688
[10] Controlled synthesis of polymer brushes by "Living" free radical polymerization techniques
Husseman, M
Malmström, EE
McNamara, M
Mate, M
Mecerreyes, D
Benoit, DG
Hedrick, JL
Mansky, P
Huang, E
Russell, TP
Hawker, CJ
[J]. MACROMOLECULES, 1999, 32 (05) : 1424 - 1431

← 1 2 3 4 →